PBN PG Composite Heating electronic Elements

Porous boron nitride industrial ceramic insulator washer ring
PBN Pyrolytic Boron Nitride round porous ceramic ring
PBN PG Composite Heating electronic Elements
PBN PG Composite Heating electronic Elements 2
PBN PG Composite Heating electronic Elements
PBN PG Composite Heating electronic Elements 2

PBN PG Composite Heating electronic Elements

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PBN/PG Composite Heating electronic Elements

Products Description

PBN PG Composite Heating electronic Elements:

Pyrolytic Boron Nitride is used as the substrate for the PBN heating element. Pyrolytic Graphite(PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.
Diameter
0.5”~4”
Power
150~3000W
Max. Working Temp.
2400 ℃

PBN PG Composite Heating electronic Elements

As both PG and PBN are extremely pure (99.99% or even higher) and very stable in a vacuum or inert atmosphere, the PBN/PG Composite Heating Elements could be very durable and keep the chamber clean. It could be heated to 1600℃ in a very short time without the emission of any gas component. It also has good resistance to acid and alkali. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.
Material Properties
Item
Unit
Apparent Density
g/cm3
2.15-2.19
Gas permeability(He)
cm3/s
<1*10-10
Micro hardness(Knoop)
N/mm2
691.88(a-b plane)
Tensile strength
N/mm2
153.86(parallel)
Bending strength
N/mm2
243.63(parallel)
197.76(parallel)
Modulus of elasticity
N/mm2
235690
Specific heat capacity
Cal/g.℃
0.371(@ 200℃)
0.442(@ 900℃)
Thermal conductivity 200℃
W/cm.k
0.6(parallel)
0.026(perpendicular)
Thermal conductivity 900℃
W/cm.k
0.4370(parallel)
0.028(perpendicular)
Dielectric Strength(RT)
KV/mm
56
Volume Resistivity
Cm
3.11*1011

 

Characteristics
√High purity(>99.999%)PBN
√Uniform heating, the difference in temperature between ±3 degree at 1000 degree
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum)
√The temperature can rise up to 1700℃ with high speed(in non-active condition and vacuum)
√Can be made to complicated shape

 

Application
MBE heaters; MOCVD、 PECVD heaters.

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