Pyrolytic boron nitride PBN PG Vertical compound heater

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Pyrolytic boron nitride PBN Vertical compound heater 3
Pyrolytic boron nitride PBN Vertical compound heater 5
Pyrolytic boron nitride PBN Vertical compound heater 3
Pyrolytic boron nitride PBN Vertical compound heater 5

Pyrolytic boron nitride PBN PG Vertical compound heater

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Pyrolytic boron nitride PBN/PG Vertical compound heater

Boron Nitride, also known as BN, hexagonal boron nitride (H-BN), and hot-pressed boron nitride, is a good self-lubricate ceramic that can withstand high temperature and maintain its lubricating capability in a high vacuum environment. Hexagonal boron nitride (H-BN) behaves similarly to graphite mechanically but offers excellent electrical resistance.

Products Description

PBN/PG Composite composite heater:

High-purity and high-performance pyrolytic boron nitride ceramics are used as the substrate for the PBN heaters. Pyrolytic graphite (PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.

As both PG and PBN are extremely pure (99.99% or even higher) and very stable in vacuum or inert atmosphere, the PBN-PG heating element could be very durable and keep the chamber clean. It could be heated to ultra high 1600 ℃ in a very short time without emission of any gas component. These heating elements are ideal products for the semiconductor industry and applications that requires high temperature, high vacuum, and high purity.
We designed and developed composite ceramic heaters for OLED and CIGS evaporation, to eliminate the disadvantages such as evaporation of impurities. short-circuit. hydrogen embrittlement. complex maintenance of Tantalum heating filament.
Pyrolytic boron nitride PBN PG Vertical compound heater
Material Properties
Item
Value
Unit
lattice constant
a:2.504×10-10 c:6.692×10-10
μ m
density
2.0-2.19
g/cm3
resistivity
3.11×1011
Ω·cm
tensile strength（ab）
153.86
N/mm2
bend strength
c
243.63
N/mm2
ab
197.76
N/mm2
elastic modulus
一
235690
N/mm2
thermal conductivity
一
“a” direction “c” direction
一
(200℃)
60 2.60
W/m·k
(900℃)
43.70 2.80
W/m·k
dielectric strength（at room temperature）
56
KV/mm
Characteristics
√No hydrogen
√Integrated structure、 convenient maintenance
√The conductor is covered by PBN, eliminate short-circuit
√Easy cleaning
√Uniform and stable heating
√Excellent corrosion resistance at high temperature
√Withstands repeated rapid heating and cooling, 200°C/min
√Keep its original shape under external force

Pyrolytic boron nitride PBN PG Vertical compound heater

Application
MBE heaters; MOCVD、 PECVD heaters.

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