Semiconductor Processes – Etching
Semiconductor Processes – Etching 1, etching process classification: There are two main types of etching processes in semiconductor manufacturing: dry etching and wet etching. Dry etching is divided into three: plasma etching, ion beam sputtering etching and reactive ion etching (RIE). Of course, etching can also be divided into graphic etching and graphic etching. Patterned etching using photoresist or other materials as a mask, only the bare part of the etching off, while no patterned etching is carried out in the [...]